Estudio de las propiedades mecánicas de películas de DLC depositadas en dos sustratos AISI D2 Y AISI 316L crecidas con la técnica de plasma PECVD mediante la variación de flujo de gas

Abstract

The present work shows the results obtained when performing the deposition of thin DLC films using the PECVD plasma technique with additional cathode on the surface of two metal, steel D2 and 316L stainless steel, varying the flow of methane gas in 6 and 12 sccm and keeping the polarization voltage stable at 700 V. The metal substrates were previously polished and tested on a profilometer where the average roughness value RA was measured obtaining values of 25 nm. Different techniques were used to characterize the DLC films: Nanoindentation, Raman Spectroscopy, Scanning Electron Microscopy (SEM) and friction Coefficient (COF).concluded that there are films with polimeric characteristics, the friction coefficient was significantly reduced and the surface hardness increased.This research was based on the parameters established in the PhD thesis. Marco Antonio Ramírez Ramos " Propriedades e parâmetros de escala de filmes de DLC depositados sobre aço ferramenta usando sistema PECVD modificado com cátodo adicional"; Due to the complexity of the research and the techniques used, it was necessary to develop the project in Brazil since this technology is not available in Colombia. Work was carried out at the Univap - Universidade do Vale do Paraíba in São José dos Campos Brazil, with the advice and supervision of Dr. Marco Antonio Ramírez Ramos, in the same way they worked together with the laboratories of the National Institute of Space Research of Brazil (INPE) and the University of São Paulo USP.