Análisis de los principios de funcionamiento de las micropalancas en el desarrollo de sistemas microelectromecánicos
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The micromechanical systems have to do with devices and the technology that includes actuators and electronic elements on micrometric scale. As basic elements for the development of these systems, here are the microcantilevers, the mechanical and dynamic characteristics of which allow to make sensors, actuators, etc. However, these investigations are carried out mostly in the first world countries. It is therefore important to begin a focus on this subject, to know its principles of operation and its applications in the world of electronics, which will allow to establish the necessary knowledge for future developments.The aim of this paper is to identify and analyze the principles of microcantilever operation in the development of microelectromechanical systems and to determine the electronic applications that are currently performed with them. For this, a wide bibliographical review was carried out, between academic articles and books related to subjects of physics, microelectromechanical systems and nanotechnology. Once the theoretical bases were established, the simulation of a microcantilever and its application as mass sensor were performed in finite element analysis software ,in order to compare the results obtained with the theoretical results. The modes of operation of the microcantilevrs, the detection and actuation methods were defined, and the main areas of development and applications were identified, including sensors, biosensors, energy pickup systems and reconfigurable filters.