Análisis crítico de los modos y algoritmos de ajuste multiparamétrico del software deltapsi2 (horiba, ltd.) para elipsometría espectroscópica

Abstract

Spectroscopic ellipsometry is a fundamental tool in the study of thin films due to its high precision and non-destructive nature. However, there is a marked contrast between the speed at which experimental data are acquired and the technical complexity required for their interpretation. This analysis is not simple; it requires a rigorous multiparametric fitting process where the validity of the results depends on the consistency between the selected optical model and the physical reality of the sample. At the Optical Characterization Laboratory of the Francisco José de Caldas District University, the use of the DeltaPsi2® software has faced a constant challenge: the lack of methodological protocols to guide the user in defining fitting strategies. This deficiency has led to the analysis relying excessively on the operator's intuition or accumulated experience, which often results in convergence difficulties, prolonged processing times, or, in the worst case, numerical solutions with no physical meaning. Faced with this problem, this research was undertaken with the aim of transforming the use of the software into a more efficient and systematic process. The main objective was to evaluate the actual performance of optimization algorithms in different scenarios of structural complexity